3D metal freeform micromanufacturing

Despite remarkable progress made in recent years, producing freeform three-dimensional micro-components out of copper, silver or gold and their alloys remains an engineering challenge: current processes are either too slow to be economically viable, produce porous otherwise imperfect metal microstructures. Here we introduce alternative, faster approach for the fabrication amenable processing noble metals. The process begins with 3D, micron-resolution, carving arbitrarily shaped interconnected molds into amorphous silica using femtosecond laser micromachining selective etching. This is followed by pressure infiltration mold molten metal, which subsequently solidified. Metal architectures produced this have micron-scale resolution, fully multiscale geometry, dense while speed largely exceeds what achieved alternative microfabrication approaches. resulting glass/metal combinations enable new micro-device architectures. Alternatively, dissolution, self-standing 3D parts produced, high metallurgical quality features sizes down ~2 μm.